Spirox MA6503D is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace QC visual inspection on surface defects, including particles, scratches, etc.
MA6503D
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Function
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Wafer
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Wafer Handling
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Chuck
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Optical
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2D Image
Inspection
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3D Image
Inspection
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Software
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Optional
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