【Spirox】Micro Inspection System

Spirox MA6503D is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace QC visual inspection on surface defects, including particles, scratches, etc.

【Features】

• Utilize a Line Scan Camera with wide FOV and fast scanning capabilities
• Use a 3x lens to enhance image quality and improve the defect characteristics inspection
• 5μm Defects Inspection Items: Particles, Scratches, Pad Defects, Bump Defects
• Support Probe Mark Inspection (PMI) and offer PAD quick selection for detection settings
• Support 3D inspection to measurement of Bump height and coplanarity
• Auto wafer-level chuck with ±1.7um accuracy to process high accuracy wafer coordinate alignment
• Zoning parameter setting to realize accurate inspection requirement by zones

【Inspection Process】

【Defect Inspection Application】

【Specification】

• Contact us for more information：www.spirox.com.tw/en/contact