Spirox MA6500 is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace IQC visual inspection on surface defects, including particles, scratches, etc.
MA6500 Specification
|
|
---|---|
Function
|
|
Wafer
|
|
Wafer Handling
|
|
Optical
|
|
Chuck
|
|
Image
Auto-Inspection
|
|
Software
|
|
Inspection Time
|
* Exclusive of photo shooting and equipment loading / unloading time
|
Options
|
|