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【SEMICS】OPUS3

【SEMICS】OPUS3

Opus3 is the only prober in the market which handles 6", 8" and 12" SEMI Standard wafer, without having any change kit. It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput. It is possible to load universal probe card.

 

【Features】

  • Compact size for space efficiency
  • Universal probe card changer
  • Reliable temperature control
  • Stiff and strong Z structure
  • Map shift prevention
  • Real-time recipe validation
  • Intelligent pin alignment algorithm
  • Smart probing route algorithm
  • Flat loader for smartest foot print
  • Compatible with all type of tester
 

【Specification】

Opus3
Wafer Size
6, 8, 12 inch
X, Y Probing Area
X:±175mm
Y:±165mm
Needle Force
500Kg
(depending on the model)
X, Y Accuracy
X:±1.5㎛
Y:±1.5㎛
Tri-Temp
Cold: -40℃ / -55℃
Hot: 150℃ / 200℃
Ambient Control (25℃)
 
 

SEMICS Inc., a semiconductor probe equipment manufacturer in Korea, founded in 2000. OPUS3 SP/HD is adopted in 6”, 8” and 12” wafer production and testing, is one of the most competitive prober in semiconductor industry.  As a leading company in providing wafer level probing solutions, SEMICS has a number of core patents in semiconductor probe equipment at home and abroad to fulfill customer needs in various aspects.