To support the evolution of high voltage applications, ERS offers a set of different High Voltage chucks, which can be customized to meet your exact requirements. Our options range from a simple 1.5kV coaxial up to 10kV coaxial, or even 3kV triaxial chuck with currents up to 600A, which can be supported for temperatures between -55°C to +300°C.
By leveraging our more than 15 years of experience in high voltage and ultra-low noise testing ERS have combined these technologies to guarantee low-level leakage during high voltage measurements up to 10kV, avoiding shot-through.
High Power Coaxial
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High Power Triaxial
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High Power Ultra-Low Noise
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Up to 10kV
Down to 1,2 nA (3kV) |
Up to 3kV
Down to 50 pA (3kV) |
Up to 3kV
Down to 5 pA (3kV) |
ERS electronic GmbH, based in Munich, has been producing innovative thermal test solutions for the semiconductor industry for 50 years. Today, thermal chuck systems developed by ERS in its product families; AC3, AirCool©, AirCool© Plus and PowerSense© are an integral component in all larger-sized wafer probers across the semiconductor industry. ERS also developed eWLB series for warpage adjustment, and has kept making technology progress and improvements over a decade.