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Automatic Optical Inspection (AOI)

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【Spirox】Macro Inspection System

【Spirox】Macro Inspection System

Spirox MA6500 is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace IQC visual inspection on surface defects, including particles, scratches, etc.

【Features】

65 mega pixel camera with high FOV and high recognizability
Use RGB particular algorithm to process color information and increase defect characteristics inspection
10μm Defects Inspection Items: Particles, Scratches, Pad Defects, Bump Defects
Auto wafer-level chuck with ±1.7μm accuracy to process high accuracy wafer coordinate alignment
Zoning parameter setting to realize accurate inspection requirement by zones

【Inspection Process】

【Defect Inspection Application】

【Specification】

MA6500 Specification
Function	Replace IQC visual inspection on surface defects (Including particles, scratches, etc.) Auto-storing wafer surface defects image and position coordinate records
Wafer	Compatible with 8-inch and 12-inch Wafer Wafer Thickness：300μm ~ 2000μm
Wafer Handling	Support automatic opening function for 12-inch FOUP cassette Wafer ID Scan Pre-aligner (Notch Location)
Optical	Camera: 65 Mega Pixel and Telecentric Lens FOV: 29mm x 22mm
Chuck	Support wafer leveling function Stage Flatness < 15μm X/Y Axis Accuracy: ±1.7μm Wafer Alignment
Image Auto-Inspection	Defect Size: > 10um Discoloration Inspection Scratches Inspection Contamination Inspection Process Defects Inspection
Software	Compatible with Wafer ID OCR Output Format: .bmp or .jpg Online Review System Storing Operation Logs
Inspection Time	90 seconds / 8-inch Wafer 150 seconds / 12-inch Wafer * Exclusive of photo shooting and equipment loading / unloading time
Options	Offline Review System Customized Report

Contact us for more information：www.spirox.com.tw/en/contact