TESCAN SOLARIS is a turn-key FIB-SEM solution for the fabrication of nanostructures and nanotechnology-inspired microscale functional devices. TESCAN SOLARIS combines the most precise Focused Ion Beam with UHR-SEM featuring TriLens™ immersion optics, to ensure the best possible connection between ion beam milling and ultra-high-resolution SEM imaging. Powerful TESCAN Essence™ software allows users to customize the GUI for specific applicationworkflows and to accommodate user expertise or preferences. TESCAN SOLARIS is easy to implement in failure analysis labs and semiconductor R&D labs that assess the production quality of semiconductor devices.
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Electron Optics
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Electron Gun
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High brightness Schottky emitter
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Electron Optics
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Triglav™ column
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Resolution
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Standard mode
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0.6 nm at 15 keV
1.2 nm at 1 keV
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Beam Deceleration mode
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0.9 nm at 1 keV
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STEM
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0.5 nm at 30 keV
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Maximum Field of View
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>10 mm at max. WD
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Electron Beam Energy
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50 eV to 30 keV
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Probe Current
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Up to 400 nA
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Ion Optics
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Ion Column
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Orage™
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Ion Gun
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Gallium liquid metal ion source
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Resolution
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< 2.5 nm at 30 keV
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Ion Beam Energy
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500 eV to 30 keV
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Probe Current
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< 1 pA to 100 nA
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SEM-FIB Coincidence at
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WDSEM = 5 mm
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TESCAN is a multinational company specializing in scientific instruments for micro morphology, structure and composition analysis. It is a world-renowned electronic micro instrument manufacturer. Its headquarters are located in the world's largest electron microscope manufacturing base - Brno, Czech Republic. Its products mainly include electron microscope, focused ion beam system, multi-channel holographic microscope and relevant analysis accessories and software, which are widely used in medicine, biology, biochemistry, agriculture, material science, metallurgy, chemistry, petroleum, pharmacy, semiconductor, electronic devices and other fields.
